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SPS Sample Z-Stages

External URL nanofaktur.com
DATASHEET SPX-Specification.pdf

Description

SPS flat Z-Stages for specimen are available with 3 different ranges: 120, 450 and 650 µm. The dimensions are the same for all ranges. The aperture is as large as 142 x 110 mm and can bear the optional sample and petri-dish holders.

Product-Number SPS-D00120 SPS-D00450 SPS-D00650 Unit
Displacement Sensor strain gages, full-bridge
Displacement, closed loop 120 450 650 µm
Displacement (-30..160 V) 170 580 820 µm
Resolution, open loop 0.4 1 2 nm
Resolution, closed loop 0.6 2 3 nm
Linearity, closed loop 0.1 %
Repeatability, closed loop 6 14 21 nm
Push/Pull 50/20 50/20 40/15 N
Resonance, unloaded 380 250 130 Hz
El. Capacitance @ 1V eff. 1kHz 4.4 13.2 13.2 µF
Electrical Connection D-Sub 15
Dimensions, L x W x H 237 x 156 x 15 mm mm
Aperture, L x W 142 x 110 mm
Body-Material aluminum, black anodized
Operating Temperature -20..80 °C

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