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LPS X/Z-Stages, 100-600µm

External URL nanofaktur.com
DATASHEET LPX-LR-Specification.pdf

Description

Product-Number LPS-D00100 LPS-D00300 LPS-D00600 Unit
Displacement (0..150 V) 100 300 600 µm
Displacement (-45..180 V) 160 480 960 µm
Resolution, open loop 0.5 1.5 3 nm
Resolution, closed loop 1 2.5 4 nm
Linearity, closed loop 0.2 %
Repeatability, closed loop 10 25 50 nm
Push/Pull 100/20 N
Stiffness 1.6 0.3 0.15 N/µm
Resonance, unloaded 900 425 225 Hz
El. Capacitance @ 1V eff. 1kHz 2.2 3.3 8.8 µF
Body-Material stainless steel
Operating Temperature -20..80 °C

Options:

  • Vacuum-Compatibility
  • Suitable driver, open-loop, EBO-050100
  • Suitable controller, closed-loop, EBD-060100

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