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LPO X/Z-Stages, Fast

External URL nanofaktur.com
DATASHEET LPX-DD-Specification.pdf

Description

Product-Number LPa-b00045 LPa-b00090 Unit
Displacement (0..150 V) 45 90 µm
Displacement (-45..180 V) 72 143 µm
Resolution, open loop 0.1 0.2 nm
Resolution, closed loop 1 2 nm
Linearity, closed loop 0.1 0.2 %
Repeatability, closed loop 5 6 nm
Push/Pull 200/25 200/25 N
Stiffness 21 10 N/µm
Resonance, unloaded 3,000 2,000 Hz
El. Capacitance @ 1V eff. 1kHz 3.3 6.6 µF
Body-Material stainless steel
Operating Temperature -20..80 °C

Options:

  • Vacuum-Compatibility
  • Suitable driver, open-loop, EBO-050100
  • Suitable controller, closed-loop, EBD-060100

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