• +1 714 809 5588
Wish List:
0 items
L2S XY-Stage, 1mm, Aperture

Description

Product-Code L2S-D01000 Unit
Position-Sensor SGS, Full-Bridge
Range, Closed Loop 1000 µm
Range, Open Loop (0..150 V) 1000 µm
Range, Open Loop (-45..180 V) 1600 µm
Resolution, open loop 5 nm
Resolution, closed loop 10 nm
Linearity, closed loop 0.2 %
Repeatability 50 nm
Push/Pull 10 N
Load 0.2 kg
Lateral Force 10 N
Stiffness 0.2 N/µm
Resonance, unloaded 105 Hz
Resonance, with 200 g load 80 Hz
Electrical Capacitance @ 1V eff, 1kHz 19.8/axis µF
Body-Material Aluminum/Stainless-Steel
Operating Temperature -20..80 °C

Options:

  • Vacuum-Compatibility
  • Suitable drivers, open-loop, 2x EBO-300100
  • Suitable controllers, closed-loop, 2x EBD-400210

+1 714 809 5588

Partners

Affiliation

© 2018 Pacific Laser Equipment