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DPx Double Lever-Actuators

External URL nanofaktur.com
DATASHEET DPX-Specification.pdf

Description

The double-levers DPO and DPS are driven by our superior MPO piezo-actuators. The large strain of these stacks is allowing for more compact shapes at the same displacements. The guidances and joints are made of electro-eroded flexures, which are avoiding friction, wear and micro-cracks. The life-times are in the order of 10 billion full-stroke cycles. The connection wires are not being moved, when the actuators are driven.

The versions DPS are equipped with strain-gage (SGS) full-bridges. These sensors guarantee temperature-compensated measuring and controlling of motion.

Product-Number DPa-b00075 DPa-b00100 DPa-b00250 DPa-b00500 DPa-b01000 Unit
Displacement (0..150 V) 75 100 250 500 1000 µm
Displacement

(-45..180 V)

120 160 400 800 1600 µm
Resolution, open loop 0.15 0.2 0.3 0.5 1 nm
Resolution, closed loop 1.5 2 6 12 25 nm
Linearity, closed loop 0.1 0.2 %
Repeatability 6 7 10 30 60 nm
Push/Pull, maximum 200/30 150/10 100/10 N
Stiffness 4.5 3.2 0.55 0.37 0.15 N/µm
Resonance, unloaded 1150 1000 550 300 200 Hz
El. Capacitance @ 1V eff. 1kHz 2.2 3.3 3.3 6.6 9.9 µF
Body-Material stainless-steel
Lenght L 30 48 48 82 112 mm
Height H 16 23 23 26 26 mm
Operating Temperature -20..80 °C

Options:

  • Vacuum-Compatibility
  • Suitable driver, open-loop, EBO 050100
  • Suitable controller, closed-loop, EBD-060100

+1 714 809 5588

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