The double-levers DPO and DPS are driven by our superior MPO piezo-actuators. The large strain of these stacks is allowing for more compact shapes at the same displacements. The guidances and joints are made of electro-eroded flexures, which are avoiding friction, wear and micro-cracks. The life-times are in the order of 10 billion full-stroke cycles. The connection wires are not being moved, when the actuators are driven.
The versions DPS are equipped with strain-gage (SGS) full-bridges. These sensors guarantee temperature-compensated measuring and controlling of motion.
|Displacement (0..150 V)||75||100||250||500||1000||µm|
|Resolution, open loop||0.15||0.2||0.3||0.5||1||nm|
|Resolution, closed loop||1.5||2||6||12||25||nm|
|Linearity, closed loop||0.1||0.2||%|
|El. Capacitance @ 1V eff. 1kHz||2.2||3.3||3.3||6.6||9.9||µF|