CPS Z-Stage, 500 µm
nanoFaktur Piezo stages and actuators
External URL: nanofaktur.com
DATASHEET: CPS-D00500-Specification.pdf
Description
CPS-D00500 is a compact Z-Stage giving a long range at small dimensions. The footprint is 60×60 mm only.
| Product-Code | CPS-D00500 (CPO-L00500 open loop) | Unit |
| Position-Sensor | SGS, Full-Bridge | |
| Range, Closed Loop | 500 | µm |
| Range, Open Loop (0..150 V) | 370 | µm |
| Range, Open Loop (-45..180 V) | 600 | µm |
| Resolution, open loop | 3 | nm |
| Resolution, closed loop | 5 | nm |
| Linearity, closed loop | 0.2 | % |
| Repeatability | 50 | nm |
| Push/Pull, maximum | 40/20 | N |
| Lateral Force, maximum | 10 | N |
| Stiffness | 0.15 | N/µm |
| Resonance, unloaded | 260 | Hz |
| Resonance, with 100 g load | 180 | Hz |
| Electrical Capacitance @ 1V eff, 1kHz | 4.4 | µF |
| Body-Material | Aluminum/Stainless-Steel | |
| Connector | DSub15 (open loop: Lemo) | |
| Operating Temperature | -20..80 | °C |
Options:
- Vacuum-Compatibility
- Suitable Driver, open-loop, EBO-050100
- Suitable Controller, closed-loop, EBD-060100
