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CPS Z-Stage, 500 µm

Description

CPS-D00500 is a compact Z-Stage giving a long range at small dimensions. The footprint is 60×60 mm only.

Product-Code CPS-D00500 (CPO-L00500 open loop) Unit
Position-Sensor SGS, Full-Bridge
Range, Closed Loop 500 µm
Range, Open Loop (0..150 V) 370 µm
Range, Open Loop (-45..180 V) 600 µm
Resolution, open loop 3 nm
Resolution, closed loop 5 nm
Linearity, closed loop 0.2 %
Repeatability 50 nm
Push/Pull, maximum 40/20 N
Lateral Force, maximum 10 N
Stiffness 0.15 N/µm
Resonance, unloaded 260 Hz
Resonance, with 100 g load 180 Hz
Electrical Capacitance @ 1V eff, 1kHz 4.4 µF
Body-Material Aluminum/Stainless-Steel
Connector DSub15 (open loop: Lemo)
Operating Temperature -20..80 °C

Options:

  • Vacuum-Compatibility
  • Suitable Driver, open-loop, EBO-050100
  • Suitable Controller, closed-loop, EBD-060100

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