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CPS Z-Stage, 250 µm

Description

CPO-L00250 and CPS-D00250 are compact Z-stages with smallest dimensions and long ranges. The footprint is 40×40 mm only.

Product-Code CPO-L00250 CPS-D00250 Unit
Position-Sensor SGS, Full-Bridge
Range, Closed Loop 250 µm
Range, Open Loop (0..150 V) 190 µm
Range, Open Loop (-45..180 V) 300 µm
Resolution, open loop 1.5 nm
Resolution, closed loop 2.5 nm
Linearity, closed loop 0.2 %
Repeatability 25 nm
Push/Pull 15/10 N
Lateral Force 10 N
Stiffness 0.2 N/µm
Resonance, unloaded 210 Hz
Resonance, with 100 g load 190 Hz
Electrical Capacitance @ 1V eff, 1kHz 2.2 µF
Body-Material Aluminium, stainless steel
Wire-Length 1.5 m
Connector Lemo DSub15
Operating Temperature -20..+80 °C

Options:

  • Vacuum-Compatibility
  • Non-Magnetic Versions
  • Suitable Driver, open-loop, EBO-050100
  • Suitable Controller, closed-loop, EBD-060100

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