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CPS Z-Stage, 100 µm

Description

CPO-L00100 and CPS-D00100 are compact Z-stages with smallest dimensions. The footprint is 40×40 mm only.

Product-Code CPO-L00100 CPS-D00100 Unit
Position-Sensor SGS, Full-Bridge
Range, Closed Loop 100 µm
Range, Open Loop (0..150 V) 75 µm
Range, Open Loop (-45..180 V) 120 µm
Resolution, open loop 0.5 nm
Resolution, closed loop 1 nm
Linearity, closed loop 0.2 %
Repeatability 10 nm
Push/Pull 15/10 N
Lateral Force 10 N
Stiffness 1.5 N/µm
Resonance, unloaded 370 Hz
Resonance, with 100 g load 310 Hz
Electrical Capacitance @ 1V eff, 1kHz 2.2 µF
Body-Material Aluminium, stainless steel
Wire-Length 1.5 m
Connector Lemo DSub15
Operating Temperature -20.. 80 °C

Options:

  • Vacuum-Compatibility
  • Non-Magnetic Versions
  • Suitable Driver, open-loop, EBO-050100
  • Suitable Controller, closed-loop, EBD-060100

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