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C3S CUBE XYZ-Stage, 600 µm

nanoFaktur Piezo stages and actuators

Description

 

Product-Number C3O-L00600 C3S-D00600 Unit
       
Position-Sensor SGS  
Range (-45..180 V) 720x720x600 720x720x600 µm
Range, closed loop 600x600x500 µm
Resolution, open loop 4 4 nm
Resolution, closed loop 6 nm
Linearity, closed loop 0.2 %
Repeatability, closed loop 50 nm
Load 200 g
Push/Pull 50/20 N
Stiffness 0.15 N/µm
Lowest Resonances, unloaded 190/145/130 Hz
El. Capacitance @ 1V eff. 1kHz 4.4/axis µF
Body-Material aluminum, stainless steel  
Dimensions 60x60x52 mm
3 Wires à 1.5 m
3 Connectors Lemosa DSub15  
Operating Temperature -20.. 80 °C

Options:

  • Vacuum-Compatibility and/or Non-Magnetic
  • Suitable drivers, open-loop, EBO-050100
  • Suitable controllers, closed-loop, EBD-060100

 

 
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