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C3S CUBE XYZ-Stage, 100 µm

Description

Product-Number C3O-L00100 C3S-D00100 Unit
Position-Sensor SGS
Displacement (0..150 V) 75 75 µm
Displacement (-45..180 V) 120 120 µm
Displacement, closed loop 100 µm
Resolution, open loop 0.5 0.5 nm
Resolution, closed loop 1 nm
Linearity, closed loop 0.2 %
Repeatability, closed loop 10 nm
Push/Pull 15/10 N
Stiffness 1.5 N/µm
Resonance, unloaded 370 Hz
Resonance, w/ load 30g 310 Hz
El. Capacitance @ 1V eff. 1kHz 2.2/axis µF
Body-Material aluminum, stainless steel
Dimensions 40x40x44.6 mm
3 Wires à 1.5 m
3 Connectors Lemosa DSub15
Operating Temperature -20..80 °C
  • Vacuum-Compatibility and/or Non-Magnetic
  • Suitable drivers, open-loop, EBO-050100
  • Suitable controllers, closed-loop, EBD-060100

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