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C2S XY-Stage, 600 µm

Description

Product-Number C2O-L00600 C2S-D00600 Unit
Position-Sensor SGS
Range (-45..180 V) 720×720 720×720 µm
Range, closed loop 600×600 µm
Resolution, open loop 4 4 nm
Resolution, closed loop 6 nm
Linearity, closed loop 0.2 %
Repeatability, closed loop 50 nm
Push/Pull 50/20 N
Stiffness 0.15 N/µm
Lowest Resonances, unloaded 190/145 Hz
El. Capacitance @ 1V eff. 1kHz 4.4/axis µF
Body-Material aluminum, stainless steel
Dimensions 60x60x33 mm
3 Wires à 1.5 m
3 Connectors Lemosa DSub15
Operating Temperature -20..+80 °C
  • Vacuum-Compatibility and/or Non-Magnetic
  • Suitable drivers, open-loop, EBO-050100
  • Suitable controllers, closed-loop, EBD-060100

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