• +1 714 809 5588
Wish List:
0 items
C2S XY-Stage, 250 µm

Description

Product-Number C2O-L00250 C2S-D00250 Unit
       
Position-Sensor SGS  
Range (-45..180 V) 330×330 330×330 µm
Range, closed loop 250×250 µm
Resolution, open loop 1 1 nm
Resolution, closed loop 3 nm
Linearity, closed loop 0.2 %
Repeatability, closed loop 25 nm
Load 150 g
Push/Pull 15/10 N
Stiffness 0.4 N/µm
Lowest Resonance, unloaded 210 Hz
Lowest Resonance, w/ load 30g 190 Hz
El. Capacitance @ 1V eff. 1kHz 2.2/axis µF
Body-Material aluminum, stainless steel  
Dimensions 40x40x30 mm
3 Wires à 1.5 m
3 Connectors Lemosa DSub15  
Operating Temperature -20..+80 °C
  • Vacuum-Compatibility and/or Non-Magnetic
  • Suitable drivers, open-loop, EBO-050100
  • Suitable controllers, closed-loop, EBD-060100

+1 714 809 5588

Partners

Affiliation

© 2018 Pacific Laser Equipment