C2S XY-Stage, 100 µm
nanoFaktur Piezo stages and actuators
External URL: nanofaktur.com
DATASHEET: C2S-D00100-Specification.pdf
Description
| Product-Number | C2O-L00100 | C2S-D00100 | Unit |
| Position-Sensor | – | SGS | |
| Range (-45..180 V) | 120×120 | 120×120 | µm |
| Range, closed loop | – | 100×100 | µm |
| Resolution, open loop | 0.5 | 0.5 | nm |
| Resolution, closed loop | – | 1 | nm |
| Linearity, closed loop | – | 0.2 | % |
| Repeatability, closed loop | – | 10 | nm |
| Load | 500 | g | |
| Push/Pull | 15/10 | N | |
| Stiffness | 1.5 | N/µm | |
| Lowest Resonance, unloaded | 370 | Hz | |
| Lowest Resonance, w/ load 30g | 310 | Hz | |
| El. Capacitance @ 1V eff. 1kHz | 2.2/axis | µF | |
| Body-Material | aluminum, stainless steel | ||
| Dimensions | 40x40x30 | mm | |
| 3 Wires à | 1.5 | m | |
| 3 Connectors | Lemosa | DSub15 | |
| Operating Temperature | -20..+80 | °C | |
- Vacuum-Compatibility and/or Non-Magnetic
- Suitable drivers, open-loop, EBO-050100
- Suitable controllers, closed-loop, EBD-060100
