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C1S X-Stages, 600 µm

Description

C1O-L00600 and C1S-D00600 are compact X-stages with smallest dimensions at ranges as long as 720 µm. The footprint is 60×46 mm only.

Product-Number C1O-L00600 C1S-D00600 Unit
Position-Sensor SGS
Range (-45..180 V) 720 720 µm
Range, closed loop 600 µm
Resolution, open loop 4 4 nm
Resolution, closed loop 6 nm
Linearity, closed loop 0.2 %
Repeatability, closed loop 50 nm
Load 200 g
Push/Pull 50/20 N
Stiffness 0.15 N/µm
Lowest Resonance, unloaded 190 Hz
El. Capacitance @ 1V eff. 1kHz 4.4/axis µF
Body-Material aluminum, stainless steel
Dimensions 60x60x21.5 mm
3 Wires à 1.5 m
3 Connectors Lemosa DSub15
Operating Temperature -20..+80 °C

Options:

  • Vacuum-Compatibility
  • Non-Magnetic Versions
  • Suitable Driver, open-loop, EBO-050100
  • Suitable Controller, closed-loop, EBD-060100

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