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C1S X-Stages, 250 µm

Description

C1O-L00250 and C1S-D00250 are compact X-stages with smallest dimensions. The footprint is 40×40 mm only. The large range of more than 300 µm is unique for those dimensions.

Product-Number C1O-L00250 C1S-D00250 Unit
Position-Sensor SGS
Range (-45..180 V) 330 330 µm
Range, closed loop 250 µm
Resolution, open loop 1 1 nm
Resolution, closed loop 3 nm
Linearity, closed loop 0.2 %
Repeatability, closed loop 25 nm
Load 150 g
Push/Pull 15/10 N
Stiffness 0.4 N/µm
Lowest Resonance, unloaded 210 Hz
Lowest Resonance, w/ load 30g 190 Hz
El. Capacitance @ 1V eff. 1kHz 2.2/axis µF
Body-Material aluminum, stainless steel
Dimensions 40x40x20 mm
3 Wires à 1.5 m
3 Connectors Lemosa DSub15
Operating Temperature -20..+80 °C

Options:

  • Vacuum-Compatibility
  • Non-Magnetic Versions
  • Suitable Driver, open-loop, EBO-050100
  • Suitable Controller, closed-loop, EBD-060100

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