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C1S X-Stages, 100 µm

Description

C1O-L00100 and C1S-D00100 are compact X-stages with smallest dimensions. The footprint is 40×40 mm only. The stiffness and lowest resonances are comparably high. So that the stages can be employed high-dynamically.

Product-Number C1O-L00100 C1S-D00100 Unit
Position-Sensor SGS
Range (-45..180 V) 120 120 µm
Range, closed loop 100 µm
Resolution, open loop 0.5 0.5 nm
Resolution, closed loop 1 nm
Linearity, closed loop 0.2 %
Repeatability, closed loop 10 nm
Load 500 g
Push/Pull 15/10 N
Stiffness 1.5 N/µm
Lowest Resonance, unloaded 370 Hz
Lowest Resonance, w/ load 30g 310 Hz
El. Capacitance @ 1V eff. 1kHz 2.2/axis µF
Body-Material aluminum, stainless steel
Dimensions 40x40x20 mm
3 Wires à 1.5 m
3 Connectors Lemosa DSub15
Operating Temperature -20..+80 °C

Options:

  • Vacuum-Compatibility
  • Non-Magnetic Versions
  • Suitable Driver, open-loop, EBO-050100
  • Suitable Controller, closed-loop, EBD-060100

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